专利名称：METHOD OF HEAT TREATMENT AND HEAT TREATMENT APPARATUS 发明人：SAITO, TAKANORI,SERIZAWA,
KAZUHIDE,ICHIKAWA, TAKASHI
申请号：EP04724135
申请日：20040329
公开号：EP1610363A4
公开日：
20080514
摘要：The present invention is a thermal processing method including: a step of conducting a predetermined thermal process in a low temperature zone to a plurality of objects to be processed held in a tier-like manner by a heating unit, in a processing container that is made of metal and has the heating unit therein, and a step of introducing a cooling gas into respective areas in the processing container divided in a height direction of the objects to be processed.
申请人：TOKYO ELECTRON LIMITED
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