工学硕士学位论文
优化制备与评价
OPTIMUM PREPARATION AND EV ALUATION OF SiO2/ Y2O3 ANTIREFLECTIVE FILM FOR INFRARED WINDOW APPLICATION
李云刚
哈尔滨工业大学
2010年06月
国内图书分类号：TB303学校代码：10213国际图书分类号：530 密级：公开
工学硕士学位论文美国制造业的衰落带来了什么启示
红外窗口用二氧化硅/氧化钇增透膜的
优化制备与评价
硕士研究生：李云刚
导师：张化宇教授
土耳其开局
申请学位：工学硕士
学科、专业：材料加工工程
所在单位：深圳研究生院客家建筑
答辩日期：2010年06月
授予学位单位：哈尔滨工业大学
Classified Index: TB303
U.D.C: 530
Dissertation for the Master Degree of Engineering
OPTIMUM PREPARATION AND EV ALUATION OF SiO2/ Y2O3 ANTIREFLECTIVE FILM FOR INFRARED
WINDOW APPLICATION
Candidate:Yungang Li
Supervisor:Professor. Huayu Zhang Academic Degree Applied for:Master of Engineering Speciality: Material Science and Engineering Affiliation: Shenzhen Graduate School
flash小品Date of Defence:June , 2010
Degree-Conferring-Institution:Harbin Institute of Technology
哈尔滨工业大学工学硕士学位论文
摘要
蓝宝石晶体具有优良的物理性能和化学性能，是目前中红外窗口较理想的材料。但是随着红外窗口向高马赫或更高马赫趋势的发展，在高温条件下，蓝宝石的强度急剧下降，红外透过率也满足不了使用要求。为了提高蓝宝石高温强度和红外透过率，在蓝宝石表面制备增透保护复合膜系是一条最有效的途径。SiO2薄膜具有优良的物理和化学性能，且与蓝宝石附着良好，适合用作提高蓝宝石高温强度的红外增透保护膜。Y2O3薄膜折射率比SiO2的稍大，可与低折射率的SiO2薄膜结合用作红外增透保护 高要市新桥中学
膜系中，但目前国内在这方面的研究还没有出现。本文主要研究蓝宝石衬底上增透保护膜系的设计，SiO2 和Y2O3薄膜的制备工艺及其对薄膜结构、性能的影响规律，以及SiO2/Y2O3复合增透薄膜的总体评价。
利用Essential Macleod 光学模拟软件在蓝宝石衬底上设计了SiO2/Y2O3的增透保护膜系，并对所设计的膜系进行了结构敏感因子和结构偏差因子分析。结果表明，蓝宝石衬底镀SiO2/Y2O3增透保护膜系，在3~5μm波段的平均透过率大于99%，完全能够满足红外窗口的设计和使用要求。大连海事大学车祸
采用射频磁控溅射的方法在蓝宝石衬底上制备了SiO2和Y2O3薄膜，研究主要的工艺参数对薄膜沉积速率的影响，采用正交实验设计软件对工艺参数进行分析，并且确定了薄膜最大沉积速率的工艺参数。
对所制备的SiO2薄膜和Y2O3薄膜进行了X射线光电子谱(XPS)、X射线衍射(XRD)分析、表面粗糙度分析(AFM)、扫描电子显微镜分析(SEM)、椭偏仪分析及退火处理。由XPS分析结果可知，薄膜中的Si、O、Y元素比接近标准氧化物比例。XRD结果表明，所制备的SiO2薄膜结构为非晶态。Y2O3薄膜低温下为非晶体状态，随温度升高开始结晶并在退火温度高于600℃会发生晶体结构转变。
对镀膜后的蓝宝石进行红外透过率分析，镀膜后的蓝宝石红外平均透过率高于未镀膜的透过率。通过微米划痕仪的测试表明，SiO2/Y2O3复合增透膜系的膜基结合力进一步增强。
关键词红外窗口；增透保护；反应磁控溅射；氧化钇；二氧化硅
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哈尔滨工业大学工学硕士学位论文
Abstract
Sapphire is an ideal material with excellent physical and chemical properties. However, with the infrared window to the high mach or higher mach, the strength of sapphire decreases dramatically at elevated temperature and the optical transmittance cannot satisfy the demand of application and design. In order to improve the high-temperature strength and transmittance, the best way is to coat the anti-reflective and protective films. Silicon dioxide (SiO2) are promising anti-reflective films with good physical,chemical properties and good adhesion to sapphire. Compared with the refractive of SiO2 films , Y2O3 has an higher refractive, and both of them can compose anti-reflective films. However, this subject has not been researched in domestic. This work researches are the design of anti-reflective films on sapphire, technical process of SiO2 and Y2O3 as a function of films structure and properties, and evaluation of SiO2 / Y2O3 films.
With the help of Essential Macleod software, anti-reflective and protective films of SiO2 / Y2O3films are designed on the sapphire substrate and analysis of structure sensitive factor and variation are done. The result of design explains that the average transmittance of SiO2 / Y2O3 films deposited on the surface of sapphire can exceed 99% in 3~5um waveband, which can meet the requirements of design and application of windows.
The designed films of SiO2 / Y2O3 are prepared on sapphire by RF-refractive magnetron sputtering, and research the main technical parameters as a function of deposit speed. According to analysis technical parameters with Orthogonal design software, we will find out the technical parameter on the highest speed deposition.
The prepared SiO2 and Y2O3 films are analysed by XPS, XRD, AFM, SEM,SE . The results show that Si, O, Y nearly compounds SiO2 and Y2O3 respectively and the deposited SiO2 films are amorphous compound. Y2O3films are crystal compound which can transform during 600℃.
The high temperature transmittance of both coated and uncoated sapphires is measured. The transmittance of coated films is improved. Micro-scratch test result shows that the interfacial adhesion of SiO2 / Y2O3 composite antireflective film is enhanced.
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