半导体专业名司缩写表

煤火单摆回复力sars冠状病毒

A/D	analog to digital
AA	atomic absorption
AAS	atomic absorption spectroscopy
ABC	activity-based costing
ABM	activity-based management
AC	alternating current; activated carbon
ACF	anisotropic conductive film
ACI	after-clean inspection
ACP	anisotropic conductive paste
ACT	alternative control techniques; actual cycle time
ADC	analog-to-digital converter
ADE	advanced development environment
ADI	after-develop inspection
ADT	applied diagnostic technique
ADTSEM	Apply/Develop Track Specific Equipment Model
AE	atomic emission; acousticemission; absolute ellipsometry
AEC	advanced equipment controller
AECS	Advanced Equipment ControlSystem; Automated Equipment Control System
AEI	after-etch inspection; automated equipment interface
AEM	analytical electron microscopy
AES	Auger emission/electron spectroscopy
AFM	atomic force microscopy
AFP	abrasive-free polish
Ag	silver
A-GEMTF	Advanced GEM Task Force
AGV	automated guided vehicle
AHF	anhydrous hydrogen fluoride
AHU	air handling unit
AIR	automated image retrieval
Al	aluminum
ALD	atomic layer deposition
ALE	atomic layer epitaxy; application logic element
ALS	advanced light source; advanced low-power Schottky
AMC	airborne molecular contamination
AMHS	automated material handling system
AMT	advanced manufacturing technology
AMU	atomic mass unit
ANN	artificial neural network
ANOVA	analysis of variance
AOV	air-operated valve
AP	adhesion promoter
APA	advanced performance algorithm
APC	advanced process control
APCD	add-on pollution control device
APCFI	Advanced Process Control Framework Initiative
APCVD	atmospheric pressure chemical vapor deposition
APEC	advanced process equipment control
API	application programming interface; atmospheric pressure ionization
APM	atmospheric passivation module; acoustic plate mode
APRDL	Advanced Products Research and Development Laboratory
aPSM	attenuating phase-shift mask
AQI	ACCESS query interface
AQL	acceptable quality level
Ar	argon
AR	aspect ratio
ARAMS	Automated Reliability
ARC	antireflective coating
ARDE	aspect ratio-dependent etching
ARPA	Advanced Research Projects Agency (see DARPA)
ARS	angle-resolved scattering
As	arsenic
AS/RS	automated storage and retrieval system
ASAP	Advanced Stepper Application Program
ASIC	application-specific integrated circuit
ASO	automatic shutoff
ASP	advanced strip and passivation; advanced strip processor
ASR	automated send receive
ATDF	Advanced ToolDevelopment Facility
ATE	automatic test equipment
ATG	automatic test generation
ATLAS	abbreviated test language for all systems
atm	atmosphere
ATP	advanced technology program; adenosine triphosphate; acceptance and tool performance
ATR	attenuated total reflectance
Att	attenuated
Au	gold
AVP	advanced vertical processor
AVS	advanced visualization system
AWE	asymptotic waveform evaluation
AWISPM	above wafer in situ particle monitoring
AWS	advanced wet station
B	billion; boron
Ba	barium
BARC	bottom antireflective coating
BASE	Boston Area Semiconductor Education (Council)
BAW	bulk acoustic wave
BC	bias contrast
BDEV	behavior-level deviation
BDS	Brownian Dynamics Simulation
Be	beryllium
BEOL	back end of line
BESOI	bonded and etchback silicon on insulator
BF	brightfield
BFGS	Broyden-Fletcher- Goldfarb-Shanno optimization algorithm
BFL	buffered field-effect transistor logic
BGA	ball grid array
BHT	Brinell hardness test
Bi	bismuth
BiCMOS	bipolar complementary metal-oxide semiconductor
BIFET	bipolar field-effect transistor
BIM	binary intensity mask
BiMOS	bipolar metal-oxide semiconductor
BIST	built-in self-test
BIT	bulk ion temperature
BITE	built-in test equipment
BMC	bubble memory controller
BMD	bulk micro defect
BOE	buffered oxide etchant
BOR	bottom of range
BOSS	Book of SEMI Standards; binary object storage system
BOX	buried oxide
BPR	beam profile reflectometry; business process reengineering
BPSG	boron phosphosilicate glass
BPTEOS	BPSG from a TEOS source
Br	bromine
BSE	backscattered electron detection
与谢野晶子 BTAB	bumped tape automated bonding
BV	breakdown voltage
C	carbon
Ca	calcium
CA	CIM architecture
CAA	CIM applications architecture
CAB	Competitive Analysis Benchmarking
CAD	computer-aided design
CADT	control application development tool
CAE	computer-aided engineering
CAI	computer-assisted instruction
CAM	computer-aided manufacturing
CAPS	computer-assisted problem solving
CAR	chemically amplified resist
CARRI	Computerized Assessment of Relative Risk Impacts
CASE	computer-aided softwareengineering; computer-aided systems engineering
CAT	computer-aided testing
CAW	Construction Analysis Workgroup
CAWC	cryogenic aerosol wafer cleaning
CBGA	ceramic ball grid array
CBS	chemical bottle storage area
CBT	computer-based training
CC	chip carrier; cluster controller
CCC	ceramic chip carrier
CCD	charge-coupled device
CCSL	compatible current-sinking logic
CCW	counterclockwise
Cd	cadmium
CD	critical dimension
CD/OL	critical dimension overlay
CDA	clean dry air
CDE	chemical downstream etch
CDEM	Customer Delivery Enterprise Model
CDI	collector-diffusion isolation
CDM	Common Device Model for SAB
CDO	controlled decomposition/oxidation
CDR	chemical distribution room
CDS	chemical distribution system
Ce	cerium
CE	capillary electrophoresis
CEC	cell evaluation chip
CEE	control execution environment
CEM	continuous emissions monitoring
CER-DIP	ceramic dual in-line package
CFA	component failure analysis
CFC	chlorofluorocarbon
CFD	computational fluid dynamics
CFM	contamination-free manufacturing
CIC	cleanroom interface chamber
CID	charge-injection device
CIE	computer-integrated engineering
CIM	computer-integrated manufacturing
CIM-OSA	computer-integrated manufacturing-open systems architecture (ESPRIT program)
CIP	Continuous Improvement Program
CIS	Center for Integrated Systems
CISC	complex instruction set computer
Cl	chlorine
CLCC	ceramic leaded chip carrier
CLIC	closed-loop intensity control
CM	configuration management; cassette module
CMC	cassette module controller
CML	current mode logic
CMM	capability maturity model
CMOS	complementary metal-oxide semiconductor
CMP	chemical mechanical planarization
CMR	common-mode rejection ratio; cancel move request
CNC	computer numerical control; condensation nucleus counter
CNT	carbon nanotube
Co	cobalt
COB	chip-on-board
COC	cost of consumables
CODEC	coder-decoder
COED	computer-optimized experimental design
COGS	cost of goods sold
CoO	cost of ownership
CORBA	common object request broker architecture
CORE	composite object reference
COSS	common object services specification
COT	customer-owned tooling
CoV	coefficient of variance
Cp	process capability
CPD	concurrent product development
CPE	Communications
CPGA	ceramic pin grid array
Cpk	process capability index
CQFP	ceramic quad flat pack
CQN	closed-queuing network
Cr	chromium
CRC	cyclic redundancy check
CRM	Cost/Resource Model
Cs	cesium
CSA	CIM systems architecture
CSE	control systems engineering
CSF	critical success factor
CSL	current-steering logic
CSMA/CD	carrier-sense
CSP	chip-scale package
CSPED	concurrent semiconductor production and equipment development
CST	CIM systems technology
CSTR	continuously stirred tank reactor
CSV	comma-separated variable
CTC	cluster tool controller
CTE	coefficient of thermal expansion
CTI	cycle time improvement
CTMC	cluster tool modular communications
Cu	copper
CUB	central utility building
CUBES	capacity utilization bottleneck efficiency system
CUI	common user interface
CUSUM	cumulative sum
CV	capacitance-to-voltage
CVCM	collected volatile condensable materials
CVD	chemical vapor deposition
CW	continuous wave
Cz	Czochralski process
D/A	digital to analog
D/B	die bonding
DAC	digital-to-analog converter
DAS	direct absorption spectroscopy
DASSL	differential algebraic system solver
DBMS	database management system
DC	direct current
DCA	direct chip attachment
DCATS	double-contained acid transfer system
DCE	distributed computer environment
DCL	digital command language; display communication log
DCS	dichlorosilane
DDL	device description language
DDMS	defect data management system
DEDS	discrete-event dynamic simulation
DES	data encryption standard; display equipment status
DF	darkfield
DFC	densified fluid clean
DFE	dual-frequency etch
DFM	design for manufacturing
DFR	design for reliability
DFT	design for test
DFY	design for yield
DHF	dilute hydrofluoric acid
DI	deionized; dielectric isolation
DIBL	drain-induced barrier leakage
DIC	differential interference contrast
DIL	dual in-line
DIP	dual in-line package
DLBI	device-level burn-in
DLOC	developed source lines of code
DLS	display lot status
DLT	device-level test
DLTS	deep-level transient spectroscopy
DMA	direct memory access; dynamic mechanical analysis
DMH	display message helps
DML	data manipulation language; display message log
DMM	digital multimeter
DMOS	diffused metal-oxide semiconductor
DMR	display move requests
DO	dynamic optimization
DOA	dead-on alignment
DOAS	differential optical absorption spectroscopy
DOE	design of experiments
DOF	depth of focus
DOP	dioctylphthalate
DPA	destructive physical analysis
DPM	digital panel meter
DPP	discharge-produced plasma
DPSRAM	dual-port static random access memory
DRAM	dynamic random access memory
DRAPAC	Design Rule and Process Architecture Council
DRC	design rule check
DRE	destruction removal efficiency
DRIFTS	diffuse reflectance infrared Fourier transform spectroscopy
DRT	defect review tool
DSA	display system activity; dimensionally stable anode
DSC	differential scanning calorimetry
DSMC	direct simulation Monte Carlo
DSQ	downstream quartz
DSS	display stocker status
DSW	direct step-on-wafer
DT	dynamic test
DTA	differential thermal analysis
DTC	direct thermocouple control
DTL	diode transistor logic
DTM	defect test monitor; delay time multiplier; device test module; digital terrain map
DTMPN	defect test monitor phase number
DUT	device under test
DUV	deep ultraviolet
DV	design verification
DVER	design rule verification
DVM	digital voltmeter
DVS	display vehicle status
DWG	domain work group
EAPSM	embedded attenuated phase-shift mask
EAROM	electrically alterable read-only memory
EASE	equipment and software emulator
e-beam	electron beam
EBHT	electron-beam high-throughput lithography
EBIC	electron beam-induced current
EBR	edge bead removal
EC	engineering change; equipment controller
ECA	engineering capability assessment
ECAD	electronic computer-aided design; engineering computer-aided design
ECAE	electronic computer-aided engineering
ECL	emitter coupled logic
ECN	engineering change notice
ECO	engineering change order
ECQB	electrochemical quartz crystal balance
ECR	electron cyclotron resonance
EDA	electronic design automation
EDS	energy-dispersive spectroscopy
EDU	equipment-dependent uptime
EDX	energy-dispersive X-ray
EDXA	energy-dispersive X-ray analysis
EEDF	electron energy distribution function
EELS	electron energy-loss spectroscopy
EEPROM	electrically erasable programmable read-only memory
EFEM	equipment front-end module
EFOCS	evanescent fiber-optic chemical sensor
EFTIR	emission Fourier transform infrared spectroscopy
EFV	excess flow valve
EGE	ethylene glycol ethers
EHS	extremely hazardous substance
EI	equipment integration
EID	Equipment InterfaceDevelopment
EIP	Equipment Improvement Program; Equipment Improvement Project
EIS	electrochemical impedance spectroscopy
EKF	extended Kalman filter
ELF	extremely low frequency
EM	enterprise model; electromagnetic; electromigration
EMA	equipment maturity assessment
EMC	valueatriskelectromagnetic capability; electromagnetic compatability
EMF	electromagnetic field
EMG	electromigration
EMI	electromagnetic interference
EMMA	electron microscopy and microanalysis
EMP	electromagnetic pulse
EMR	enter move request
EMU	electromagnetic unit
EOS	electrical overstress
EOT	end of transfer; equivalent oxide thickness
EP	extreme pressure; electropolish
EPL	electron projection lithography
EPR	electron paramagnetic resonance
EPROM	electrically programmable read-only memory
EPSS	electronic performance support system
EPT	equipment performance tracking
EQUIP	C/I equipment control and integration
EQUIP	RTC equipment real-time control
ERAM	equipment reliability
ERM	enterprise reference model
ERN	external recurrent neural network
ERP	extended range pyrometer
ERS	event reporting standard
ERT	emergency response time
ES	engineering specification; expert system
ESC	electrostatic chuck
ESCA	electron spectroscopy for chemical analysis
ESD	electrostatic discharge
ESH	environment
ESM	electronic service manual
ETAB	Executive Technical Advisory Board
ETQR	External Total Quality and Reliability
EUV	extreme ultraviolet
eV	electron volt
EWMA	exponentially weighted moving average
F	fluorine
F/I	final inspection
FA	failure analysis
FAB	fast atom bombardment
FAMOS	floating-gate avalanche-injection metal-oxide semiconductor
FBGA	fine-pitch ball grid array
FC	flip chip
FCM	facilities cost model
FCS	factory control system
FDC	fault detection and classification
FDE	frequency domain experiments
FDSOI	fully depleted silicon on insulator
Fe	iron
FEC	fabrication evaluation chip
FEM	finite element model
FEOL	front end of line
FESEM	field emission scanning electron microscopy
FET	field-effect transistor
FFT	fast Fourier transform
FFU	filter fan unit
FI	filterability index; factory integration
FIB	focused ion beam
FID	flame ionization detector
FIFO	first-in
FIMS	front-opening interface mechanical standard
FL	fuzzy logic
FLOPC	floating point operations needed per cycle
FLOTOX	floating gate tunnel oxide
FLRT	factory layout/relayout tool
FM	foreign material
FMEA	failure mode and effects analysis
FMMC	factory material movement component
FMVP	Framework Member Validation Project
FNN	feed-forward neural network
FOCS	fiber-optic chemical sensor
FOSB	front opening shipping box
FOUP	front opening unified pod
FOV	field of view
FOX	field oxide
FP	flash point
FPD	focal plane deviation; flat panel display
FPGA	field-programmable gate array
FPLA	field-programmable logic array
FPLF	field-programmable logic family
FPLS	field-programmable logic switch
FPMS	Factory Performance Modeling Software
FPROM	field-programmable read-only memory
FRACAS	Failure Reporting
FRAME	Failure Rate Analysis and Modeling
FRMB	fast ramp mini batch
FSG	fused silica glass
FSM	finite state machine
FT	final test; Fourier transform
FTA	fault tree analysis
FTAB	Focus Technical Advisory Board
FTIR	Fourier transform infrared
FW	full wave
FWHM	full-width half-maximum
FZ	float zone
Ga	gallium
GAC	granular activated carbon
GC	gas chromatography; gravimetric calibrator
GCC	generic cell controller
GCD	gas chromatography distillation
GCMS	gas chromatography mass spectroscopy
GDPP	gas drive plasma pinch
GDS	graphical design system; graphical design software
Ge	germanium
GEM	Generic EquipmentModel
GEMVS	GEM verification system
GES	generic equipment simulator
GFC	gas filter correlation
GFCI	ground fault circuit interrupter
GIDL	gate-induced drain leakage
GILD	gas immersion laser doping
GLC	gas liquid chromatography
GOI	gate oxide integrity
GPIB	general-purpose interface bus
GSCE	gas source control equipment
GTS	GEM Test System
H	hydrogen
HAP	hazardous air pollutant
HARI	high aspect ratio inspection
HAST	highly accelerated stress testing
HAZCOM	Hazard Communication Standard
HB	horizontal Bridgeman crystal
HCI	hot carrier injection
HCM	hollow cathode magnetron
HCMOS	high-density CMOS
HCS	hot-carrier suppressed
HD	high density
HDL	hardware description language
HDP	high-density plasma
HDPE	high-density polyethylene
He	helium
HEM	high-efficiency matching
HEPA	high-efficiency particulate air
Hf	hafnium
HF	hydrofluoric acid
Hg	mercury
HIBS	heavy ion backscattering spectrometry
HiPOx	high-pressure oxygen
HLF	horizontal laminar flow
HMDS	hexamethyldisilizane
HMIS	hazardous materials inventory statement
HMMP	hazardous materials management plan
HMOS	high-performance MOS; high-density MOS
HOMER	hazardous organic mass emission rate
HOPG	highly oriented pyrolitic graphite
HP	high purity
HPEM	Hybrid Plasma Equipment Model
HPI	high pressure isolation
HPL	high-performance logic
HPLC	high-performance liquid chromatography
HPM	hazardous production materials; high-purity metal
HPV	high-pressure vent
HRA	human reliability analysis
HRR	high ramp rate
HRTEM	high-resolution transmission electron microscopy
HSQ	hydrogen silsesquioxane
HTO	high-temperature oxidation
HTRB	high-temperature reverse bias
HUPW	hot ultrapure water
HVAC	heating
I	iodine
I/O	input/output
I2L	integrated injector logic
I300I	International 300 mm Initiative
IC	integrated circuit; Investment Council; ion chromatography
ICAP	inductively coupled argon-plasma spectrometry
ICMS	integrated circuit measurement system
ICP	inductively coupled plasma
ICP-AES	inductively coupled plasma atomic emission spectroscopy
ICP-MS	inductively coupled plasma mass spectrometry
ICT	ideal cycle time
IDDQ	direct drain quiescent current
IDEAL	initiating
IDL	interface definition language
IDLH	immediately dangerous to life or health
IDS	interactive diagnostic system
IEA	ion energy analysis
IEC	infused emitter coupling
IEDF	ion energy distribution function
IERN	internal-external recurrent neural network
IF	interface
IGFET	insulated-gate field-effect transistor
ILB	inner lead bond
ILD	interlevel dielectric; interlayer dielectric
ILS	intracavity laser spectroscopy
IM	integrated model; integrated metrology
IMD	intermetal dielectric
IMMA	ion microphobe mass analysis
IMS	ion mobility spectroscopy
In	indium
INCAMS	individual cassette manufacturing system
IPA	isopropyl alcohol
IPL	ion projection lithography
IPT	ideal process time
Ir	iridium
IR	infrared
IRAS	infrared reflection-absorption spectroscopy
IRIS	imaging of radicals interacting with surfaces
IRN	internal recurrent neural network
IRONMAN	Improving Reliability of New Machines at Night
IRTC-1	interconnect reliability test chip-1
IS	information systems; interface specifications; integrated systems
ISC	Industry Steering Council
ISEM	inspection/review specific equipment model
ISM	inductor super magnetron
ISMT	International SEMATECH
ISPM	in situ particle monitor
ISR	in situ rinse
ISS	ion scattering spectroscopy
ITRI	Interconnection Technology
ITRS	International Technology
IVH	interstitial via hole
IVP	integrated vacuum processing
JDP	Joint Development Program
JEDEC	Joint Electron Device Engineering Council
JESSI	Joint European Submicron Silicon Initiative
JIC	Joint Industrial Council
JIT	just-in-time
JJT	Josephson junction transistor
JVD	jet vapor deposition
K	potassium; thousand
keV	kilo electron volt
KPA	key process area
Kr	krypton
kV	kilovolt
La	lanthanum
LAMMA	laser micro-mass analysis
LAMMS	laser micro-mass spectroscopy
LC	inductance-capacitance; liquid chromatography
LCA	lifecycle analysis
LCC	leaded chip carrier
LCL	lower confidence limit
LDD	lightly doped drain
LDL	lower detection limit
LDP	low-density plasma
LDPE	low-density polyethylene
LEC	liquid encapsulated Czochralski crystal
LEL	lower explosive limit
LER	line edge roughness
LF	laminar flow
LFL	lower flammable limit
LGQ	linear Gaussian quadratic
Li	lithium
LI	laser interferometry
LIC	linear integrated circuit
LID	leadless inverted device
LIFO	last in
LIMA	laser-induced mass analysis
LIMS	laser-induced mass spectrometry
LLCC	leadless chip carrier
LLD	lower limit of detection
LLNQ	least lots next queue
LM	light microscope
LMMA	laser microprobe mass analysis
LOCOS	local oxidation of silicon
LOS	loss of selectivity
LPC	linear predictive coding; laser particle counter; low particle concentration; liquid-borne particle counter
LPCVD	low-pressure chemical vapor deposition
LPD	light point defect
LPE	liquid phase epitaxy
LPI	low-pressure isolation
LPP	laser-produced plasma
LRS	laser Raman spectroscopy
LSE	latex sphere equivalent
LSHI	large-scale hybrid integration
LSI	large-scale integration
LSM	laser scanning microscope
LTA	laser thermal anneal
LTCVD	low-temperature chemical vapor deposition
LTO	low-temperature oxidation/oxide
LTPD	lot tolerance percent defective
LTV	local thickness variation
LV	latent variable
LVDT	linear voltage differential transducer
LVI	low-voltage inverter
LVS	layout verification of schematic
LWR	linewidth reduction
LWS	large wafer study
M	million; mega
MACT	maximum achievable control technology
MALDI	matrix-assisted laser desorption and ionization
MAN	metropolitan area network
Management	Standard
Manufacturing	and Science
MAP	manufacturing automation protocol
Master	Deliverables List
MAWP	maximum allowable working pressure
MB	machine batch
MBC	machine bath collection
MBE	molecular beam epitaxy
MBPC	model-based process control
MBTC	model-based temperature control
MCBA	mean cycles between assists
MCBF	mean cycles between failures
MCBI	mean cycles between interrupts
MCM	multichip module; manufacturing cycle management
MCP	master control processor;multichip package
MCS	material control system
MCU	microprocessor control unit; mobile calibration unit
MCVD	metal chemical vapor deposition
MDL	minimum detection limit;
MD-MOS	multi-drain metal-oxide semiconductor
MDQ	market-driven quality
MEBS	medium energy backscattering spectrometry
MEEF	mask error enhancement factor
MEMS	microelectromechanical system
MERIE	magnetically enhanced reactive ion etching
MES	manufacturing execution systems
MESFET	metal-semiconductor field-effect transistor
METS	Materials and Equipment Trading Service
MeV	mega electron volt
MFC	mass flow controller
MFM	mass flow meter
Mg	magnesium
MG	manufactured goods
MHI	material hazard index
MHz	megahertz
MIC	monolithic integrated circuit
MID	material ID
MIE	magnetron ion etching
MIM	metal-insulator-metal
MIS	metal insulator silicon
MLCC	multilayer ceramic capacitor
MLL	modify lot location
MLM	multilevel metal
MLR	message log report
MMC	Manufacturing Methods Council
MMD	Microlithographic Mask Development program
MMIC	monolithic microwave integrated circuit
MMM	material movement management
MMMS	Material Movement
MMO	multimodel optimization
MMOS	modified MOS
MMST	Microelectronics Manufacturing Science and Technology
Mn	manganese
MNOS	metal-nitride-oxide semiconductor
MNS	metal-nitride semiconductor
Mo	molybdenum
MO	metal-organic
MOCVD	metal-organic chemical vapor deposition
MOP	modify operating procedures
MOS	metal-oxide semiconductor
MOS-C	metal-oxide semiconductor capacitor
MOSFET	metal-oxide semiconductor field-effect transistor mp melting point
MP	massively parallel
MP-OES	multipoint optical emission spectroscopy
MPRES	modular plasma reactor simulator
MPU	microprocessor unit
MRP	materials requirements planning
MRP-II	manufacturing resource planning
MS	mass spectrometry; mass spectroscopy
MSDS	Material Safety Data Sheet
MSEM	Metrology Specific Equipment Model
MSG	Management Steering Group
MSHA	Mine Safety and Health Administration
MSI	medium-scale integration; manufacturing support item
MSID	mass spectrometer lead detector
MSLD	mass spectrometer leak detector
MSTAB	Manufacturing Systems Technical Advisory Board
MTBA	mean time between assists
MTBF	mean time between failures
MTBFp	mean (productive) time between failures
MTBI	mean time between interrupt; mean time between incident
MTOL	mean time off line; mean time on line
MTS	Material Tracking Standard
MTTA	mean time to assist
MTTF	mean time to failure
MTTR	mean time to repair
MV	megavolt
MVTR	moisture vapor transmission rate
MW	molecular weight
MWBC	mean wafers between cleans
MWT	monitor wafer turner
N	nitrogen
Na	sodium
NA	numerical aperture
NCMS	National Center for
NCS	Network Communication Standard
NDA	nondisclosure agreement
NDE	nondestructive evaluation
NDIR	nondispersive infrared spectroscopy
NDP	neutron depth profiling
NDT	nondestructive testing
NDUV	nondispersive ultraviolet spectroscopy
NEC	National Electric Code
NESHAP	National Emissions Standards for Hazardous Air Pollutants
NFOM	near-field optical microscopy
NGL	next-generation lithography
Ni	nickel
NIL	nanoimprint lithography
NIRA	near-infrared reflection analysis
NMOS	negative channel metal-oxidesemiconductor
NMR	nuclear magnetic resonance
NN	neural network
NRE	nonrecurring engineering
NTRS	National Technology Roadmap for Semiconductors
NTU	nephelometric turbidity unit
NVR	non-volatile residue
O	oxygen
OBA	object behavior analysis
OBEM	Object-Based Equipment Model
OBIC	optical beam-induced current
OBL	object-based language
OC	open cassette
OCR	optical character recognition
OD	outside diameter
ODS	ozone-depleting substances
OEE	overall equipment effectiveness
OEM	original equipment manufacturer
OES	optical emission spectroscopy
OHT	overhead transport; overhead hoist transport
OHV	overhead vehicle
OL	overlay
OLB	outer lead bond
OLE	object linking and embedding
OM	operational modeling; optical microscopy
OMA	object management architecture
OMS	optical mass spectroscopy
OMT	object modeling technique
OO	object-oriented
OOA	object-oriented analysis
OOD	object-oriented design
OODB	object-oriented database
OODBMS	object-oriented database management system
OOP	object-oriented programming
OPC	optical particle counter; optical proximity correction
OS	operating system
OSD	organic spin-on dielectric
OSF	Open Systems Foundation
OSG	organosilicate glass
OSI	open system interconnection
OSRM	Office of Standard Reference Materials
OSS	Object Services Standard
Ox	oxide
P	phosphorous
P/T	precision-tolerance
PAB	post-apply bake
PAC	photoactive compound
PACVD	plasma-assisted chemical vapor deposition
PA-FTIR	photoacousticFourier transform infrared spectroscopy
PAG	photoacid generator
PAL	process automation language; programmable array logic; process asset library
PAM	process application module
PAS	photoacoustic spectroscopy
PAWS	portable acoustic wave sensor
Pb	lead
PBET	Performance-Based Equipment Training
PBGA	plastic ball grid array
PBL	poly-buffered LOCOS
PBS	photon backscattering
PC	personal computer; programmable controller; process control
PCAD	packaging computer-aided design
PCB	printed circuit board
PCMP	post-chemical mechanical polishing
PCMS	plasma chemistry Monte-Carlo simulation
PCO	photocatalytic oxidation
PCR	principle component regression
PCT	process change team
Pd	palladium
PDC	passive data collection
PDF	portable document format
PDSOI	partially depleted silicon on insulator
PDU	protocol data unit
PDVC	phase-dependent voltage contrast
PEB	post-exposure bake
PECVD	plasma-enhanced chemical vapor deposition
PED	post-exposure delay
PEDS	plasma-enhanced deposition system
PEELS	parallel electron energy loss spectrometry
PEL	permissible exposure level
PES	photoelectron spectroscopy
PET	post-etch treatment
PETEOS	plasma-enhancedtetraethylorthosilicate
PFA	perfluoroalkoxy
PFC	perfluorocarbon
PFPE	perfluorinated polyether
PGA	pin grid array
P-GILD	projection gas immersion laser doping
PGV	person-guided vehicle
PI	proportional integral
PID	proportional integral derivative; process-induced defect
PIII	plasma immersion ion implantation
PIND	particle impact noise detection
PIP	process-induced particle
PIV	peak inverse voltage; post indicator valve
PLA	programmable logic array
PLC	programmable logic controller
PLCC	plastic leaded chip carrier
PLL	plasma lockload
PLS	partial least squares; projection of latent structures
PLY	photolimited yield
PM	process monitor; preventive maintenance; process module
PMC	process module controller
PMCC	Pensky-Martens closed cup
PMI	phase measuring interferometer
PMMA	polymethyl methacrylate
PMOS	positive channel metal-oxide semiconductor
PMS	particle measuring system
PMT	photomultiplier tube
PMTF	Product Management Task Force
POR	process-of-record
POU	point-of-use
POUCG	point-of-use chemical generation
PPE	personal protective equipment
PPGA	plastic pin grid array
PPID	process program identification
PQFP	plastic quad flat pack
PRAS	particle reactor analysis services
PRB	pseudo-random binary
PRBS	pseudo-random binary sequence
PROM	programmable read-only memory
PRSC	parametric response surface control
PRV	person rail guided vehicle
PS	porous silicon
PSB	phase-shifting blank
PSC	porous silicon capacitor
PSD	power spectral density; port status display
PSG	phosphosilicate glass
PSII	plasma source ion implantation
PSL	polystyrene latex
PSLS	polystyrene latex sphere
PSM	phase-shift mask
Pt	platinum
PTAB	Project TechnicalAdvisory Board
PTC	pre- and post-process treatment chambers
PTFE	polytetrafluorethylene
PVA	polyvinylacetate
PVC	polyvinylchloride
PVD	physical vapor deposition
PVDF	polyvinylidene fluoride
PWB	printed wiring board
PWP	particles per wafer pass
QA	quality assurance
QC	quality control
QCM	quartz crystal microbalances
QDR	quick dump rinse
QFD	quality function deployment
QFP	quad flat pack
QMS	quadrupole mass spectrometry
QSR	quality system review
QTAT	quick turn around time
R2R	run-to-run
Ra	radium
RAC	remote access and control
RAIRS	reflection-absorption infrared spectroscopy
RAM	random access memory;reliability
RAMP	Reliability Analysis and Modeling Program
Rb	rubidium
RBB	base sheet resistance
RBS	refractive backscattering; Rutherford backscattering spectroscopy
RCWA	rigorous coupled wave analysis
RDR	rotating disk reactor
Re	rhenium
REL	recommended exposure limit
Research	Institute
RESSFOX	recessed sealed sidewall field oxidation
RF	radio frequency; resonance frequency
RFI	request for information; radio frequency interference
RFM	radio frequency monitoring
RFO	restricted flow orifice
RFP	request for plan; request for proposal; radio frequency probe
RGA	residual gas analysis
RGV	rail-guided vehicle
RH	relative humidity
RI	reliability improvement
RIE	reactive ion etch
RISC	reduced instruction set computer/computing
RIST	rule induction and statistical testing
RMOS	refractory metal-oxide semiconductor
RMS	root mean square; Recipe Management Standard
RMTF	Recipe Management Task Force
RNN	recurrent neural network
RO	reverse osmosis
Roadmap	for Semiconductors
ROC	remote object communications
ROE	return on equity
ROI	return on investment
ROM	read-only memory
RPAO	remote plasma-assisted oxidation
RR	removal rate
RRMSEP	relative root mean square error of prediction
RSE	reactive sputter etch
RSF	relative sensitivity factor
RSM	response surface methodology; response surface matrix
RT	room temperature
RTA	rapid thermal anneal
RTB	real-time backplane
RTCVD	rapid thermal chemical vapor deposition
RTD	resistance temperature detector
RTL	resistor-transistor logic; register transfer level
RTM	rapid thermal multiprocessing
RTO	rapid thermal oxidation; regenerative thermal oxidizer
RTP	rapid thermal processing/processor
RTR	real-time reporting
Ru	ruthenium
S	sulfur
S/D	source/drain
S/N	signal-to-noise
SA	surface area; subresolution assist; structured analysis
SAM	scanning auger microscopy
SAT	spray acid tool
SAW	surface acoustic wave
Sb	antimony
SB	strong base ion exchange
SC1	Standard Clean 1
SC2	Standard Clean 2
SCA	surface charge analysis
SCALE	SEMATECH Cell Application Learning Environment
SCALPEL	scattering with aperture limited projection lithography
SCC	strategic cell controller
SCCS	source code control system
SCE	short channel effects
SCF	super critical fluid
SCI	surface charge imaging
SCM	scanning capacitance microscopy
SCOE	SEMATECH Center of Excellence
SCP	single-chip package
SCR	silicon-controlled rectifier
SD	small dual in-line package; structured design
SDFL	Schottky-diode FET logic
Se	selenium
SE	spectroscopic ellipsometry; secondary electron
SEAJ	Semiconductor Equipment Association of Japan
SEC	size exclusion chromatography
SECS	Semiconductor Equipment Communications Standard
SEG	selective epitaxial growth
SEIM	software engineering improvement method
SEM	scanning electron microscopy; specific equipment model
SEMI	Semiconductor Equipment and Materials International
SFC	supercritical fluid chromatography
SFCS	shop floor control system
SFCS	I/F shop floor control system interface
SGMRS	Semiconductor Generic Manufacturing Requirements Specification
Si	silicon
SIA	Semiconductor Industry Association
SIDP	sputter ion depth profiling
SIMO	single input
SIMOX	separation by implantation of oxygen
SIMS	secondary ion mass spectroscopy
SiP	system-in-a-package
SISO	single input
SL	specification limit
SLAM	scanning laser acoustic microscopy; single-layer aluminum metallization
SLC	surface laminar circuit
SM	stress migration
SMB	single-mask bumping
SMC	surface-mounted component
SME	subject matter expert; software maintenance engineer
SMIF	standard mechanical interface
SMPM	SECS message protocol machine
SMS	SECS message service
SMTS	Strategic Material Transport System
Sn	tin
SNMS	sputtered neutral mass spectroscopy
SNOM	scanning near-field optical microscopy
SNR	signal-to-noise ratio
SO	small outline (package)
SoC	system-on-a-chip
SOD	spin-on dielectric
供应链库存管理论文SODAS	SEMATECH Organized Damage Analysis Software
SOG	spin-on glass
SOI	silicon on insulator
SOIC	small outline integrated circuit
SOM	scanning optical microscopy; sulfuric acid-ozone mixture
SoP	system-on-a-package
SOP	standard operating procedure
SOS	silicon on sapphire
SPC	statistical process control
SPICE	simulation program with integrated circuit emphasis
SPIDER	SEMATECH Process Induced Damage Effect Revealer
SPIDER-MEM	SPIDER-Manufacturing Equipment Monitor
SPIN	Software Process Improvement Network
SPM	scanning probe microscopy
SPP	single-phase printing
SPR	semiconductor process representation
SPV	surface photo voltage
SQC	statistical quality control
SQPMM	Software Quality and Process Maturity Model
Sr	strontium
SRAM	static random access memory
SRC	Semiconductor Research Corp.
SRP	spreading resistance probe
SRS	software requirements specification
SSA	Semiconductor Safety Association; spatial signature analysis
SSE	sum squared error
SSEM	Stepper Specific Equipment Model
SSI	small-scale integration
SSM	strategic sourcing methodology
sSOI	strained silicon on insulator
SSQA	Standardized Supplier Quality Assessment
SSRL	SEMATECH Software Reuse Library
SSRP	SEMATECH Software Reuse Program
STAR	simultaneous transmitted and reflected
STEL	short-term exposure limit
STEM	scanning transmission electron microscopy
STI	shallow trench isolation
STM	scanning tunneling microscopy
STP	standard temperature and pressure; system test plan
SU	subresolution attenuated
SWEAT	standard wafer-level electromigration accelerated test
SWI	static walkthrough/inspection
SWIM	Semiconductor Workbench for Integrated Modeling
SWP	single-wafer processing
SWR	semiconductor wafer representation
SWV	square wave voltammetry
T/C	thermocompression
Ta	tantalum
TAB	Technical Advisory Board; tape automated bonding
TAP	Tool Application Program
TAS	trace analysis system
TASC	Technical Analysis Service for CoO
TAT	turnaround time
TBAH	tetrabutylammonium hydroxide
TC	time constant; temperature coefficient; thermocouple
TCA	test calibration assembly; 1
TCAD	technology computer-aided design
TCC	tactical cell controller
TCE	temperature coefficient of expansion
TCM	tunneling current microscopy
TCP	transformer-coupled plasma; tape carrier package
TCP/IP	transmission control protocol/Internet protocol
TCR	temperature coefficient of resistance
TD	thermal desorption
TDDB	time-dependent dielectric breakdown
TDEAT	tetrakis (diethylamino) titanium
TDLAS	tunable diode laser absorption spectroscopy
TDMAT	tetrakis (dimethylamido) titanium
TDMS	thermal desorption mass spectrometry
TDS	thermal desorption spectroscopy
Te	tellurium
TE	transverse electric; transmitted electron
TEA	transverse excited atmosphere
TEC	thermal expansion coefficient; test and electrical characterization
TECAP	transistor electrical characterization and analysis program
TED	transient enhanced diffusion; transmitted electron detection
TEG	technical exchange group
TEM	transmission electron microscopy; transverse electromagnetic
TEOS	tetraethylorthosilicate; tetrethoxysilicide
TFC	total fault coverage
TFE	tetrafluorethylene
TFT	thin-film transistor
TG	thermogravimetry
TGA	thermal gas analysis; thermal gravimetric analysis
THC	total hydrocarbons
Ti	titanium
TIBA	triisobutlaluminum
TIR	total indicator runout; total internal reflection
TIS	tool-induced shift
Tl	thallium
TLC	thin layer chromatography
TLE	tool loading elevator
TLI	thin layer imaging
TLM	tape-laying machine; telemeter; transition line model
TLV	threshold limit value
TLV/TWA	threshold limit value/time-weighted average
TM	transport module
TMA	thermal mechanical analyzer
TMB	trimethylborate
TMC	transport module controller; transfer module controller
TMP	trimethylphosphate; turbomolecular pump
TO	transistor outline package
TOA	take-off angle
TOC	total organic carbon; total oxidizable carbon
TOF	time-of-flight
TPD	temperature program desorption
TPG	test pattern generation
TPM	total productive maintenance; total productive manufacturing
TPRS	temperature programmed reaction spectroscopy
TPU	thermal processing unit
TQM	total quality management
TSCA	Toxic Substances Control Act
TSI	top surface imaging
TSOP	thin small outline package
TSP	temperature-sensitive parameter
TT	technology transfer
TTL	transistor-transistor logic
TTV	total thickness variation
TVS	triangular voltage sweep
TWA	time-weighted average
TWG	Technical Working Group
TXRF	total X-ray fluorescence
U	uranium
UBM	under-bump metallurgy
UCL	upper confidence limit; upper control limit
UF	ultra-filtration
UHF	ultrahigh frequency
UHP	ultrahigh purity
UHV	ultrahigh vacuum
UID	user identification
ULA	uncommitted logic array
ULK	ultralow-k
ULPA	ultralow particulate air
ULSI	ultralarge-scale integration uph units per hour
UPW	ultrapure water
USART	universal synchronous/ asynchronous receiver/transmitter
USOP	ultrasmall outline package
Utt	unattenuated
UV	ultraviolet
V	vanadium; volt
VAC	volts alternating current
VAR	value-added reseller; volt-ampere reactive
VASE	variable angle spectroscopic ellipsometry
VDC	volts direct current
VDP	Van der Pauw
VDS	vapor distribution system
VHF	very high frequency
VLE	vapor levitation epitaxy
VLF	vertical laminar flow
VLSI	very large-scale integration
VME	versa micromodule extension; virtual manufacturing enterprise
V-MOS	v-groove metal-oxide semiconductor
VOC	volatile organic compound
VPD	vapor phase desorption; vapor phase decomposition
VPD-ICPMS	vapor phase decomposition-inductively coupled plasma mass spectroscopy
VTP	vertical thermal processor
VTVM	vacuum tube voltmeter
VUV	vacuum ultraviolet
W	tungsten
W/B	wire bonding
WAN	wide area network
WB	weak base
WBS	work breakdown structure
WBSEM	Wire Bonder Specific Equipment Model
WDS	wavelength-dispersive spectrometry of X-rays
WDX	wavelength-dispersive X-ray
WDXA	wavelength-dispersive X-ray analysis
WEC	wafer environment control
WFT	wafer fabrication template
WIB	within-batch
WIP	work in process; work in progress
WIW	within-wafer
WIWNU	within-wafer non-uniformity
WLBI	wafer-level burn-in
WLP	wafer-level package
WLT	wafer-level test
WNP	waste neutralization plant
WPC	wafer process chamber
wph	wafers per hour
WSI	wafer-scale integration
WTC	wafer transfer chamber
WTW	wafer to wafer
WTWNU	wafer-to-wafer non-uniformity
X	inductive reactance
XANES	X-ray adsorption near edge structure spectroscopy
Xe	xenon
XLS	excimer laser system; extended light scatterer
XPS	X-ray photoelectron spectroscopy
XRD	X-ray diffraction
XRF	X-ray fluorescence spectrometry
Y	yttrium
YAG	yttrium aluminum garnet
Z	zinc
Zr	zirconium

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