摘 要：最近几年来在半导体工业和液晶显示器制造等工艺中，对清洁真空环境的要求愈来愈高。如在半导体的等离子增强气相沉淀(PECVD)和反映离子刻蚀(RIE)工艺中，在液晶生产上利用的蚀刻制程和生产TFT荧幕电浆(PLASMA)的CVD制程中，不但要求环境清洁，而且还需要抽除大量含有微小颗粒及粉尘的反映生成气体。这些问题都不是传统的有油泵所能解决的。本文的研究对象——螺杆式干式真空泵，抽气腔内无任何工作液，保证了被抽暇间不受污染;无油蒸汽排放，保证了外部环境的清洁。由于阴阳转子齿面间留有间隙，因此能够抽除含有粉尘，或有侵蚀性，有毒的气体。作者要紧着重于以下几个方面的研究：干式螺杆真空泵的大体原理。阴阳螺杆的型线研究。螺杆端面型线采纳双边对称圆弧型线，推导出啮合原理的数学表达式，成立几何模型推导出端面型线方程，继而推导出螺旋齿面方程。几何特性的研究等。 关键词：干式真空泵 螺杆 型线
Abstract: Recently，in the semiconductor太阳能电池板制作 process of plasma enhanced chemical
vapor deposition (PEVCD) and reactivled镜前灯e ion etching (RIE)，in the liquid crystal display device manufacture process of etching and PLASMA CVD production, it has not only high demand of vacuum environment cleanliness, but also need to extract a huge amount of reaction-gas containing particle and dust. The conventional oil pump can't solve the problems智能自吸泵 mentioned above. The research object in this paper-dry screw CO2封存vacuum pump has no operating fluid in the extracting chamber. It can guarantee space extracted and out side clean. It can extract gas containing mill dust ,corrosivity ,and poison ,because it has small gap between tooth face of male and female rotors .I have focused on there search as following .The profile research of male and female screws长效连续捕鼠器 . The end face profile is double sides and symmetrical circles. Deduce the mathematic expression of meshing principle; establish the geometric model and deduce the equations of end face profile, then the Equations of helical 兔子全自动设备tooth face .The research of geometrical properties，etc.
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