首页 > 专利技术

SUBSTRATE SUPPORT STRUCTURE, HEAT TREATMENT APPARA

专利名称：SUBSTRATE SUPPORT STRUCTURE, HEAT TREATMENT APPARATUS USING SAME,

FIRST SHEET-LIKE OBJECT FOR USE IN THE

SUBSTRATE SUPPORT STRUCTURE,

METHOD OF MANUFACTURING THE

SUBSTRATE SUPPORT STRUCTURE, HEAT

TREATMENT APPARATUS, AND SUBSTRATE

SUCKING METHOD

发明人：Yasuhiro Fukumoto,Masao Tsuji,Hiroshi

Miyauchi,Hideyuki Taniguchi

申请号：US11688006

申请日：20070319

公开号：US20070222131A1

公开日：

20070927

专利内容由知识产权出版社提供专利附图：

摘要：A heat treatment apparatus includes a support sheet placed on an upper surface of a heat-treating plate. The support sheet has, formed on an upper surface thereof, projections for contacting and supporting a substrate, and a lip for contacting edge regions of the substrate. The support sheet is

formed by an etching process, and therefore areas of the sheet around the projections are recessed, rather than being perforated as in the case of laser processing. These heat-treating plate and support sheet constitute a substrate support structure capable of supporting the substrate properly.

申请人：Yasuhiro Fukumoto,Masao Tsuji,Hiroshi Miyauchi,Hideyuki Taniguchi

地址：Kyoto JP,Kyoto JP,Kyoto JP,Kyoto JP

国籍：JP,JP,JP,JP

本文发布于:2024-09-24 15:23:03，感谢您对本站的认可！

本文链接：https://www.17tex.com/tex/3/460401.html

上一篇：CLEANING AGENT, CLEANING METHOD AND CLEANING APPAR

下一篇：PRESSURE PLATE DEVICE FOR COPYING APPATATUS