专利名称：Melt gap measurement apparatus, crystal growth apparatus, and melt gap measurement method
发明人：陳 俊宏,▲藍▼ 文杰，中西 正美，李 奇澤，施 ▲英▼汝，徐 文慶
申请号：JP2016084195
申请日：20160420
公开号：JP6393705B2
公开日：
20180919
摘要：A melt gap measuring apparatus is adapted to measure the gap between the bottom of the heat insulating cover and the surface of the raw material melt inside a crucible. The melt gap measuring apparatus includes a first light-guiding probe having a first upper side and a first bottom side which are opposite to each other. The first upper side is exposed to an inner wall of the heat insulating cover, and the first bottom side protrudes from the bottom side of the heat insulating cover. An image capturing device is disposed above the heat insulating cover to capture the image of the first upper side. Moreover, a crystal growth apparatus and a method of measuring the melt gap are also provided.
申请人：環球晶圓股▲ふん▼有限公司
代理人：特許業務法人 ユニアス国際特許事務所
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