专利名称:PVD process for the deposition of Al2O3 and a coated cutting tool with at least one
电容手套layer of Al2O3
发明人:Dominic Diechle,Veit Schier
申请号:US16761867
申请日:20181107
公开号:US11326248B2
公开日:alo
20220510
专利附图:
摘要:A coated cutting tool including a substrate and a single layer or multi-layer hard material coating is provided. The substrate is selected from cemented carbide,
cermet, ceramics, cubic boron nitride (cBN), polycrystalline diamond, steel or high-speed steel. The hard material coating includes at least one layer of gamma-AlO, exhibiting particularly high hardness and reduced Young's modulus. The gamma-AlOlayer of the coated cutting tool is obtainable by means of a reactive magnetron sputtering process using at least one Al target, wherein the deposition is carried out using a reaction gas composition of argon (Ar) and oxygen (O) at a total reaction gas pressure within the range from at least 1 Pa to at most 5 Pa, at an Opartial pressure within the range from 0.001 Pa to 0.1 Pa, and at a temperature within the range from 400° C. to 600° C.
富氧设备申请人:WALTER AG
地址:Tubingen DE
国籍:DE
代理人:Corinne R. Gorskictp版材
苯丙酮合成