Kj :\2020-5-28\[天才】\已传一传感器与微系统\2020-06\G 2020=^ps 20200M8 15:00:09 Time : 20200528 15:27:482020年第39卷第6期传感器与微系统(Transducer and Microsystem Technologies)33 DOI : 10.13873/J. 1000-9787(2020)06-0033-04
机械振动应力下IMU 内MEMS 传感器的抗振研究* *收稿日期=2019-04-02
*基金项目:国家自然科学基金资助项目(61434003)王晓初J 郭帅良蔦刘玉县S 张谦J 李宾J 范耀华I (1.广东工业大学广东省计算机集成制造重点实验室,广东广州510006;
2.广东顺德创新设计研究院,广东佛山528300)
摘 要:针对惯性测量单元(IMU)内部微机电系统(MEMS)传感器粘固在印刷电路板(PCB)上,外界载 体产生的机械振动使其受迫振动,长时间作用会引发传感器机械疲劳、结构断裂以及性能退化等问题,根 据结构动力学原理,分析双自由度系统模型,并运用MATLAB 软件进行仿真,以出影响因素及其设定范 围;同时,保证在加速度计带宽范围内的信号1:1传递给加速度计。研究结果表明:载体机械振动信号在 10 kHz 范围内时,适当降低陀螺仪和加速度计的品质因数,PCB 的固有频率保持在1kHz 以内以及其 品质 因数不大于10,可有效降低振动应力对传感器的影响。
免清洗焊锡丝关键词:惯性测量单元;微机电系统(MEMS)传感器;双自由度;增强抗振;加速度计带宽;MATLAB 仿真 中图分类号:TP212 文献标识码:A 文章编号:1000-9787(2020)06-0033-04Research on anti-vibration of MEMS sensor in IMU
under mechanical vibration stress *防辐射面料
WANG Xiaochu 1, GUO Shuailiang 1, LIU Yuxian 2, ZHANG Qian 1, LI Bin 1, FAN Yaohua 1(1・ Guangdong Provincial Key Laboratary of Computer Integrated Manufacturing , Guangdong
University of Technology , Guangzhou 510006, China ;
2. Guangdong Shunde Innovation Design Institute ,Foshan 528300,China)居家地毯
蜂巢芯Abstract : Aiming at the problem that micro-electro-mechanical system ( MEMS ) sensor is stuck on PCB in inertial measurement unit( IMU) ,the mechanical vibration generated by external carrier is forced to vibrate,long term effects can cause problems such as mechanical fatigue , structural fracture , and performance degradation of the sen s or, according to the principle of structural dynamics, the two-degree-of-freedom system model is
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analyzed , a n d the simulation is performed by MATLAB software to find out the influencing factors and their setting range. At the same time , the signal transmitted to the accelerometer by 1 : 1 within the accelerometer bandwidth is guaranteed ・ The research results show that when the mechanical vibration signal of the carrier is in the range of 10 kHz, appropriately reduce the quality factor of the gyroscope and the accelerometer , natural frequency of the PCB is kept within 1 kHz and the quality factor is not more than 10, which can effectively reduce the influence of vibration stress on the sensor ・无镜框眼镜
Keywords : inertial measurement unit( IMU) ; MEMS sensor ; double degree of freedom ; enhance anti ・vibration ; accelerometer bandwidth ; MATLAB simulation
0引言惯性测量单元(inertial measurement unit, IMU)广泛应 用于航空、航天、航海等领域⑴。微机电系统(MEMS)陀螺 用于测量运动体的角速度,MEMS 加速度计用于测量运动 体的加速度⑵。
疲劳是材料在受到交变应力重复作用后材料强度下 降⑶.MEMS 传感器其结构在工作过程中往往要受到机械 振动⑷,而振动环境下的断裂失效往往是由于长期高强度 振动下的材料疲劳引起的⑸,文献[6,7]提出了振动原理
及减振隔振技术,为本文研究抗振型的IMU 提供了可靠的 理论依据。文献[8]从实际问题出发,给
出了振动疲劳与 载荷的变化频率、结构的振动模态、结构模态阻尼等因素密 切相关。本文从中得到启示,研究机械振动对MEMS 传感 器的影响,出影响因素的设定范围,以确保加速度计和陀 螺仪稳定工作⑼。