专利名称：METHOD FOR PRODUCING AND TESTING A CORROSION-RESISTANT CHANNEL IN A SILICON DEVICE
发明人：HARRIS, James, M.,PATEL, Sapna
申请号：EP03786769.4
申请日：20031117
公开号：EP1565932A2
公开日：
丝杠加工
弹簧线
20050824
摘要：A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine.
A wetted path of a MEMS device is coated (210) with either an organic compound resistant to attack by atomic fluorine or a material capable of being passivated by atomic fluorine. The device is then exposed to a gas that decomposes into active fluorine compounds (220) when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gases like CIF3. The gas will passivate the material (if applicable) and corrode any exposed silicon. The device is tested (230) in such a manner that any unacceptable corrosion of the wetted path will cause the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.粉体气力输送系统
申请人：Redwood Microsystems, Inc.
双向呼叫地址：959 Hamilton Avenue Menlo Park, CA 94025 US
国籍：US光固化打印
lzr种子代理机构：Liesegang, Eva
豫公网安备41160202000603
站长QQ:729038198
关于我们
投诉建议