MEMS三维微力探针传感器设计及性能测试王伟忠;赵玉龙;林启敬【摘 要】In this paper, an improved micro electro mechanical system (MEMS) tri-axial micro-force probe sensor based on piezoresistive effect was designed and its performance
MEMS三维微力探针传感器设计及性能测试王伟忠;赵玉龙;林启敬【摘 要】In this paper, an improved micro electro mechanical system (MEMS) tri-axial micro-force probe sensor based on piezoresistive effect was designed and its performance
MEMS三维微力探针传感器设计及性能测试王伟忠;赵玉龙;林启敬【摘 要】In this paper, an improved micro electro mechanical system (MEMS) tri-axial micro-force probe sensor based on piezoresistive effect was designed and its performance